国产浸没式光刻机量产

报道称中国开始量产国产浸没式芯片制造设备，首批DUV光刻机将于今年交付中芯国际、华虹和长鑫存储等厂商。如属实，将是国产半导体设备在先进制程供应链中的重要突破。

事件进展（2 篇报道）

1. 2026-07-28 03:42
   Reddit r/technology China begins mass production of homegrown immersion chipmaking machines in major breakthrough, report claims — first DUV lithography units will be delivered this year to SMIC, Hua Hong, and CXMT
2. 2026-07-27 22:28
   Reddit r/hardware China Starts Mass-Producing Homegrown DUV Chipmaking Tools, An Advance for Local Chip Industry

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